DocumentCode
1889038
Title
Growth of InP and GaAs substrate crystals by the vertical gradient freeze method
Author
Grant, I.R. ; Sahr, U.
Author_Institution
Wafer Technol. Ltd., Milton Keynes, UK
fYear
2002
fDate
2002
Firstpage
413
Lastpage
415
Abstract
VGF crystal growth is rapidly gaining ground as a manufacturing method for both GaAs and InP. Its position in GaAs is well established and it is expected to grow further in importance with increased uptake of epitaxial processing for microwave electronics. Utilisation in InP is, so far, less widespread, with greater challenges in single crystal yield. The general trend towards larger substrate diameters provides further opportunities to take advantage of the lower crystal defect density offered by the technique.
Keywords
III-V semiconductors; crystal growth from melt; dislocation density; gallium arsenide; indium compounds; GaAs; InP; crystal defect density; crystal growth from melt; epitaxial processing; manufacturing method; microwave electronics; single crystal yield; substrate diameters; vertical gradient freeze method; Consumer electronics; Crystalline materials; Crystallization; Crystals; Epitaxial growth; Gallium arsenide; Indium phosphide; Manufacturing; Materials science and technology; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials Conference, 2002. IPRM. 14th
ISSN
1092-8669
Print_ISBN
0-7803-7320-0
Type
conf
DOI
10.1109/ICIPRM.2002.1014455
Filename
1014455
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