DocumentCode
1889428
Title
Analytical investigation of non-collisional electron heating
Author
Rauf, Sakandar ; Kushner, Mark J.
Author_Institution
Illinois Univ., Urbana, IL, USA
fYear
1997
fDate
19-22 May 1997
Firstpage
237
Lastpage
238
Abstract
Summary form only given. Non-collisional heating is an important phenomenon in low pressure inductively coupled plasmas. In this paper, a self-consistent analytical model for non-collisional heating is developed. The model is used to investigate the physical mechanism of non-collisional heating, and quantify the effect of plasma density, electron temperature and excitation frequency. It is also demonstrated that this model can adequately take account of non-collisional heating effects in plasma simulations.
Keywords
plasma density; plasma heating; plasma simulation; plasma temperature; analytical investigation; electron temperature; excitation frequency; low pressure inductively coupled plasmas; noncollisional electron heating; physical mechanism; plasma density; plasma simulations; self-consistent analytical model; Electrons; Etching; Frequency; Heating; Plasma applications; Plasma density; Plasma simulation; Plasma temperature; Plasma waves; Poisson equations;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location
San Diego, CA, USA
ISSN
0730-9244
Print_ISBN
0-7803-3990-8
Type
conf
DOI
10.1109/PLASMA.1997.604966
Filename
604966
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