Title :
Analytical investigation of non-collisional electron heating
Author :
Rauf, Sakandar ; Kushner, Mark J.
Author_Institution :
Illinois Univ., Urbana, IL, USA
Abstract :
Summary form only given. Non-collisional heating is an important phenomenon in low pressure inductively coupled plasmas. In this paper, a self-consistent analytical model for non-collisional heating is developed. The model is used to investigate the physical mechanism of non-collisional heating, and quantify the effect of plasma density, electron temperature and excitation frequency. It is also demonstrated that this model can adequately take account of non-collisional heating effects in plasma simulations.
Keywords :
plasma density; plasma heating; plasma simulation; plasma temperature; analytical investigation; electron temperature; excitation frequency; low pressure inductively coupled plasmas; noncollisional electron heating; physical mechanism; plasma density; plasma simulations; self-consistent analytical model; Electrons; Etching; Frequency; Heating; Plasma applications; Plasma density; Plasma simulation; Plasma temperature; Plasma waves; Poisson equations;
Conference_Titel :
Plasma Science, 1997. IEEE Conference Record - Abstracts., 1997 IEEE International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-3990-8
DOI :
10.1109/PLASMA.1997.604966
