Metamaterial millimeter wave devices on silicon substrate: Band-pass filter and directional coupler

This paper presents the design and manufacturing of millimeter wave metamaterial Composite Right / Left Handed (CRLH) devices - directional coupler and band-pass filter - on silicon substrate in coplanar waveguide (CPW) configuration. The devices were designed and simulated in a frequency band between 35 GHz-40 GHz for the band-pass filter and between 26 GHz-28 GHz for the directional coupler. Both devices were technologically processed on a 0.5 mm thick silicon substrate with a 3000 Å Au / 500 Å Cr metallization layers. The silicon substrate was chosen because it offers the possibility of future device integration in more complex mm-wave circuits. The results of the measurements on the fabricated devices validate the calculated values of the electrical parameters.