Bulk sub-atmospheric pressure hydride sources for MOCVD

Sub-atmospheric pressure gas sources are based on the reversible adsorption of hydride gas on to a high surface area substrate within a cylinder. This paper discusses and compares these sources to conventional high-pressure hydride cylinders with respect to a) safety and risk reduction, b) gas delivery and purity and c) cost of ownership. Release rate test data and performance data shows that these sources are not only a safer alternative to compressed gas cylinders but that the technology can be scaled up for the supply of large quantities of high purity arsine and phosphine for MOCVD applications.