Dry releasing of electroplated rotational and overhanging structures

Author

Hirano, Toshiki ; Furuhata, Tomotake ; Fujita, Hiroyuki

Author_Institution

IBM Toyko Res. Lab., Kanagawa, Japan

fYear

1993

fDate

7-10 Feb 1993

Firstpage

278

Lastpage

283

Abstract

Fabrication by the dry release of electroplated metallic structures is reported. This method results in thick structural height and high yield. It allows the micromechanism to be integrated with electrical circuits, and the needle-shaped residual of the sacrificial layer can be used as the bearing of the micromotor. As examples of this method, micromotors and overhanging structures are demonstrated. A new micromotor design is proposed. Its fabrication and successful testing are described. Overhanging structures such as an LTU (lateral tunneling unit) AFM (atomic force microscope) with overhanging AFM tip and a micro-flow sensor were designed and successfully fabricated

Keywords

atomic force microscopy; electric sensing devices; electroplating; electrostatic devices; flowmeters; integrated circuit technology; machine bearings; micromechanical devices; small electric machines; sputter etching; AFM; MEMS; bearing; dry release; electroplated metallic structures; fabrication; high yield; isotropic plasma etching; lateral tunneling unit; micro-flow sensor; micromachining; micromotor; needle-shaped residual; overhanging structures; sacrificial layer; thick structural height; Etching; Fabrication; Inorganic materials; Micromotors; Microstructure; Plasma applications; Plasma materials processing; Plasma temperature; Silicon; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Conference_Location

Fort Lauderdale, FL

Print_ISBN

0-7803-0957-X

Type

conf

DOI

10.1109/MEMSYS.1993.296909

Filename

296909