Title :
Implementation of MEMCAD system for electrostatic and mechanical analysis of complex structures from mask descriptions
Author :
Gilbert, J.R. ; Osterberg, P.M. ; Harris, R.M. ; Ouma, D.O. ; Cai, X. ; Pfajfer, A. ; White, J. ; Senturia, S.D.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Abstract :
The development of a first implementation of the MEMCAD system (version 1.0) is reported. The system is composed of three commercial mechanical CAD software packages integrated with specialized structure generation and electrostatic analysis programs. The authors describe the system and demonstrate its capabilities using a comb drive example constructed directly from a CIH description of its mask set. The analysis of the comb drive, all the way from generating a full 3-D model from mask descriptions to calculating comb levitation forces, takes just a few hours
Keywords :
CAD; electrostatics; masks; mechanical engineering computing; mesh generation; micromechanical devices; software packages; solid modelling; 3-D model; MEMCAD system; MEMS; PATRAN; capacitance matrix; comb drive; comb levitation forces; complex structures; eigenmodes; electrostatic analysis programs; mask descriptions; mechanical CAD software packages; mesh generation; micromachining; structure generation programs; Analytical models; Computational modeling; Computer simulation; Electrostatic analysis; Microelectromechanical devices; Micromechanical devices; Packaging; Sociotechnical systems; Software packages; Visualization;
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL
Print_ISBN :
0-7803-0957-X
DOI :
10.1109/MEMSYS.1993.296921
