Title :
Single-crystal silicon torsional resonators
Author :
Mihailovich, Robert E. ; Zhang, Z.L. ; Shaw, K.A. ; MacDonald, Noel C.
Author_Institution :
Sch. of Electr. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
Micromechanical torsional resonators with micron-sized torsion rods fabricated from single-crystal silicon are described. The resonators and their excitation electrodes are fabricated with two simple processes called SCREAM (single-crystal-silicon reactive etch and metal). The properties of each electrode-actuator scheme are evaluated using electrostatic simulations. Such torsional resonators have potentially lower mechanical dissipation, and torsional resonators with integrated electrodes have potentially novel actuation applications
Keywords :
electric sensing devices; elemental semiconductors; masks; micromechanical devices; photolithography; resonators; silicon; sputter etching; torsion; SCREAM; Si; electrostatic simulations; elemental semiconductors; excitation electrodes; integrated electrodes; micromechanical devices; micron-sized torsion rods; reactive etch and metal; single crystal Si; single-mask; torsional resonators; Bars; Clamps; Dielectric substrates; Electrodes; Etching; Geometry; Mechanical sensors; Sensor phenomena and characterization; Silicon; Thermoelasticity;
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL
Print_ISBN :
0-7803-0957-X
DOI :
10.1109/MEMSYS.1993.296925
