Fluid-filled dielectric induction micromotor with Al-SiO2 rotor

Results obtained with a dielectric induction micromotor with an Al-SiO₂ rotor are presented. The rotor and gold electrode stator, fabricated separately in IC processes, are immersed in a fluid (water, ethanol or glycerine). The aluminium rotors, 2-μm thick and 100-200 μm in diameter, are covered on all surfaces by a SiO₂ layer. The motor was operated at field frequencies between 0.3 kHz and 30 MHz and applied voltages varying between 5 and 110 V. At maximum voltage, a rotation speed of 16000 rpm was measured. The calculated value of torque was approximately 3×10^-13 Nm