Title :
Distributed electrostatic micro actuator
Author :
Yamaguchi, Motoharu ; Kawamura, Shuji ; Minami, Kazuyuki ; Esashi, Masayoshi
Author_Institution :
Fac. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
A micro actuator that is called a distributed electrostatic actuator, because it consists of many driving units, and that is driven by electrostatic force is described. Each driving unit has wavelike electrodes, which are insulated and pull each other by the electrostatic force. The deformation of this actuator depends on the electrostatic force, the elasticity of the structure, and the external force. The motion of the actuator was analyzed with the finite-element method (FEM), and a macro model of the actuator was fabricated to verify its motion. It was confirmed that the actuator´s apparent compliance can be controlled by a feedback control system using capacitive displacement sensing and electrostatic driving
Keywords :
compliance control; electric actuators; electrostatic devices; feedback; finite element analysis; micromechanical devices; apparent compliance; capacitive displacement sensing; distributed electrostatic actuator; electrostatic driving; electrostatic force; feedback control system; finite-element method; macro model; microactuator; wavelike electrodes; Control systems; Displacement control; Elasticity; Electrodes; Electrostatic actuators; Feedback control; Finite element methods; Insulation; Microactuators; Motion analysis;
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL
Print_ISBN :
0-7803-0957-X
DOI :
10.1109/MEMSYS.1993.296944
