Distributed electrostatic micro actuator

Author

Yamaguchi, Motoharu ; Kawamura, Shuji ; Minami, Kazuyuki ; Esashi, Masayoshi

Author_Institution

Fac. of Eng., Tohoku Univ., Sendai, Japan

fYear

1993

fDate

7-10 Feb 1993

Firstpage

18

Lastpage

23

Abstract

A micro actuator that is called a distributed electrostatic actuator, because it consists of many driving units, and that is driven by electrostatic force is described. Each driving unit has wavelike electrodes, which are insulated and pull each other by the electrostatic force. The deformation of this actuator depends on the electrostatic force, the elasticity of the structure, and the external force. The motion of the actuator was analyzed with the finite-element method (FEM), and a macro model of the actuator was fabricated to verify its motion. It was confirmed that the actuator´s apparent compliance can be controlled by a feedback control system using capacitive displacement sensing and electrostatic driving

Keywords

compliance control; electric actuators; electrostatic devices; feedback; finite element analysis; micromechanical devices; apparent compliance; capacitive displacement sensing; distributed electrostatic actuator; electrostatic driving; electrostatic force; feedback control system; finite-element method; macro model; microactuator; wavelike electrodes; Control systems; Displacement control; Elasticity; Electrodes; Electrostatic actuators; Feedback control; Finite element methods; Insulation; Microactuators; Motion analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Conference_Location

Fort Lauderdale, FL

Print_ISBN

0-7803-0957-X

Type

conf

DOI

10.1109/MEMSYS.1993.296944

Filename

296944