Electrothermal microactuators based on dielectric loss heating

Author

Rashidian, Bizhan ; Allen, Mark G.

Author_Institution

Sch. of Electr. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

fYear

1993

fDate

7-10 Feb 1993

Firstpage

24

Lastpage

29

Abstract

A method for microactuation based on excitation using the heat generated as a result of dielectric loss of materials at high frequencies is presented. This concept has been realized by fabricating electrothermal microactuators, composed of a layer of the copolymer of vinylidene fluoride and trifluoroethylene (PVDF-TrFE), on top of polyimide, using a fully integrated, self-aligned process. These actuators show larger deflection per unit temperature rise than conventional resistively heated electrothermal microactuators due to the properties of the materials used. In addition, they are easy to fabricate, can be remotely excited, and are capable of underwater operation. The actuation mechanism has been verified and a simplified model as well as a finite-element model have been developed. The measured values are in good agreement with those predicted by the model

Keywords

dielectric heating; dielectric losses; finite element analysis; micromechanical devices; piezoelectric actuators; PVDF-trifluoroethylene copolymer; dielectric loss heating; electrothermal bimorphs; electrothermal microactuators; finite-element model; fully integrated; high frequencies; piezoelectric polymers; polyimide; self-aligned process; underwater operation; Actuators; Dielectric losses; Dielectric materials; Electrothermal effects; Finite element methods; Frequency; Heating; Microactuators; Polyimides; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Conference_Location

Fort Lauderdale, FL

Print_ISBN

0-7803-0957-X

Type

conf

DOI

10.1109/MEMSYS.1993.296945

Filename

296945