Title :
Real three dimensional micro fabrication using stereo lithography and metal molding
Author :
Ikuta, K. ; Hirowatari, Ken
Author_Institution :
Dept. of Mech. Syst. Eng., Kyushu Inst. of Technol., Fukuoka, Japan
Abstract :
A technique for three-dimensional micro fabrication using stereo lithography is proposed. It is called the IH process (integrated hardened polymer stereo lithography) and is suitable for microstructures made of both polymer and metals. The experimental apparatus developed and the fabrication of various 3-D microstructures, such as bending pipe, connected pipe, microcoil spring, and one-way valve, are described
Keywords :
electroplating; microassembling; micromechanical devices; photolithography; polymers; valves; 3-D microstructures; MEMS; bending pipe; connected pipe; electroplated metal; integrated hardened polymer; metal molding; microcoil spring; one-way valve; polymer cast; real 3D microfabrication; stereo lithography; Fabrication; Laser beams; Lithography; Machining; Mechanical systems; Polymers; Shape; Silicon; Systems engineering and theory; Thickness control;
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL
Print_ISBN :
0-7803-0957-X
DOI :
10.1109/MEMSYS.1993.296949
