Title :
Rechargeable solid state lithium microbatteries
Author :
Bates, J.B. ; Gruzalski, G.R. ; Luck, C.F.
Author_Institution :
Oak Ridge Nat. Lab., TN, USA
Abstract :
A rechargeable thin-film lithium battery that can be used as a miniature power supply for small devices has been developed. The battery consists of an amorphous vanadium pentoxide (aV2O5) cathode, an amorphous lithium phosphorus oxynitride (Lipon) electrolyte, and a lithium anode. A thin-film cover layer protects the battery from exposure to air and water vapor. The battery can deliver up to 60 μA/cm2 of current between 3.6 V and 1.5 V. Higher voltages can be achieved by fabricating two or more cells in series. A 1-cm2 cell with a 1-1.5-μm-thick cathode discharged from 3.6 to 1.5 V at 12 μA typically yields about 440 mC and delivers about 1 J. Using the combined mass of the cathode, electrolyte, and the anode (3× over capacity), the specific energy of the cell is 1.4×106 J/kg and the energy density is 2.1×106 J/L
Keywords :
lithium; micromechanical devices; secondary cells; 1 J; 12 muA; 3.6 to 1.5 V; Li anode; Li3PO4OxNy; Lipon electrolyte; MEMS device application; amorphous V2O5 cathode; miniature power supply; rechargeable solid state microbatteries; small devices; thin-film cover layer; Amorphous materials; Anodes; Batteries; Cathodes; Lithium; Power supplies; Protection; Solid state circuits; Thin film devices; Transistors;
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL
Print_ISBN :
0-7803-0957-X
DOI :
10.1109/MEMSYS.1993.296957