Title :
A new tonometer based on the application of micro-mechanical sensors
Author :
den Besten, C. ; Bergveld, P.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
An instrument for the measurement of intraocular pressure (IOP) is presented. It consists of a micromachined silicon sensor, which measures the diameter of a flattened part of the eye globe and simultaneously determines the smallest distance between the center of the sensor and the contour of this applanation. In the center of this applanation sensor a micro mechanical plunger is realized, which transfers the applied pressure to a separate force sensor. Preliminary results show that this sensor may improve the accuracy of Mackay-Marg-based electronic tonometers
Keywords :
biomedical equipment; biomedical measurement; electric sensing devices; eye; micromechanical devices; pressure sensors; Mackay-Marg principle; Si; applanation sensor; diameter; elemental semiconductor; eye globe; flattened part; measurement of intraocular pressure; micromachined Si sensor; micromechanical plunger; micromechanical sensor; tonometer; Area measurement; Cornea; Diseases; Force sensors; Instruments; Mechanical sensors; Medical treatment; Pressure measurement; Sensor phenomena and characterization; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.
Conference_Location :
Fort Lauderdale, FL
Print_ISBN :
0-7803-0957-X
DOI :
10.1109/MEMSYS.1993.296961
