Hybrid ultrasonic micromachined motors

Author

Racine, G.A. ; Luthier, R. ; de Rooij, N.F.

Author_Institution

Inst. of Microtechnol., Neuchatel Univ., Switzerland

fYear

1993

fDate

7-10 Feb 1993

Firstpage

128

Lastpage

132

Abstract

A hybrid ultrasonic motor has been fabricated using silicon micromachining and metallic micromechanical components. The concept of elastic force motors (EFMs) is applied for the conversion of standing waves to mechanical energy. Millimeter-size prototypes (6×6×2 mm) show interesting characteristics. Free rotation speed up to 600 rpm and net torque of 50 nNm are observed. Typical applications are the motorization of electronic watches or the positioning systems in instrumentation

Keywords

micromechanical devices; piezoelectric motors; small electric machines; Si micromachining; Si-ZnO; conversion of standing waves; elastic force motors; electronic watches; hybrid ultrasonic motor; instrumentation; mechanical energy; metallic micromechanical components; micromachined motors; micromotors; millimetre sized prototypes; motorization; piezoelectric ZnO film; positioning systems; Biomembranes; Leg; Mechanical energy; Micromachining; Micromotors; Rotors; Silicon; Stators; Synchronous motors; Watches;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1993, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE.

Conference_Location

Fort Lauderdale, FL

Print_ISBN

0-7803-0957-X

Type

conf

DOI

10.1109/MEMSYS.1993.296966

Filename

296966