DocumentCode
1892877
Title
An experimental assessment of Casimir force effect in micro-electromechanical systems
Author
Ardito, Raffaele ; Corigliano, Alberto ; De Masi, B. ; Frangi, Alejandro
Author_Institution
Dept. of Struct. Eng., Politec. di Milano, Milan
fYear
2008
fDate
26-29 Oct. 2008
Firstpage
90
Lastpage
93
Abstract
An experimental setup is proposed in order to evaluate the effect of Casimir forces between two parallel plates, separated by a sub-micron gap. The results of the performed tests are critically evaluated by comparison with theoretical predictions, account taken of some peculiar features of Casimir forces for finite thickness silicon slabs. The obtained results suggest that Casimir forces could play an important role for micro and nano devices.
Keywords
Casimir effect; electromagnetic fields; micromechanical devices; plates (structures); slabs; Casimir force effect; experimental assessment; finite thickness silicon slabs; micro-electromechanical systems; parallel plates; Casimir effect; Elementary particle vacuum; Fluctuations; Microelectromechanical systems; Rough surfaces; Silicon; Slabs; Surface roughness; Temperature; Thermal force;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2008 IEEE
Conference_Location
Lecce
ISSN
1930-0395
Print_ISBN
978-1-4244-2580-8
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2008.4716390
Filename
4716390
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