DocumentCode :
1892923
Title :
Ultra-low-power hydrogen sensing with palladium nanowires
Author :
Offermans, P. ; Crego-Calama, M. ; Brongersma, S.H. ; Tong, H.D. ; van Rijn, C.J.M.
Author_Institution :
Holst Centre/IMEC-NL, Eindhoven
fYear :
2008
fDate :
26-29 Oct. 2008
Firstpage :
98
Lastpage :
101
Abstract :
Palladium nanowires (50 nm diameter, ~5 mum length) have been fabricated on silicon substrates using conventional techniques. The room temperature hydrogen sensing behavior of individual nanowires was investigated. The nanowires show a reversible response to hydrogen concentrations as low as 2.5 ppm with an ultra low power consumption of less than 10 nW. The electrical resistance increases nonlinearly with the hydrogen concentration. Response times (t90) vary from 5 seconds (H2 concentrations > 20%) to 30 seconds (H2 concentrations < 100 ppm). The response times can be decreased by increasing the applied bias at the cost of sensitivity.
Keywords :
electrical resistivity; gas sensors; nanofabrication; nanowires; palladium; Pd; Si; conventional technique; electrical resistance; hydrogen concentration; palladium nanowire fabrication; room temperature hydrogen sensing behavior; silicon substrate; temperature 293 K to 298 K; Delay; Fabrication; Hydrogen; Nanowires; Palladium; Sensor arrays; Silicon; Temperature sensors; Transducers; Wireless sensor networks;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2008 IEEE
Conference_Location :
Lecce
ISSN :
1930-0395
Print_ISBN :
978-1-4244-2580-8
Electronic_ISBN :
1930-0395
Type :
conf
DOI :
10.1109/ICSENS.2008.4716392
Filename :
4716392
Link To Document :
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