DocumentCode
1893185
Title
Equivalent-circuit model for electrostatic micro-torsion mirror
Author
Matsuda, Kazunori
Author_Institution
Dept. of Nano & Bio Mater. Eng., Tokushima Bunri Univ., Kagawa, Japan
fYear
2010
fDate
26-29 Oct. 2010
Firstpage
1
Lastpage
4
Abstract
An equivalent circuit model for micro-torsion mirror is reported, which uses open-source circuit simulator Qucs and demonstrated mixed simulation between micro mechanics and electrical circuit. In the simulation, electrostatic force, equation of motion, and Kirchhoff s law are considered. Mathematical operation in the equation of motion is interrupted as an electrical capacitor, so that a seamless multi-physics mixed simulation becomes possible.
Keywords
electrostatic devices; micro-optomechanical devices; micromechanics; micromirrors; torsion; Kirchhoff law; electrical capacitor; electrostatic force; electrostatic microtorsion mirror; equation of motion; equivalent-circuit model; micromechanics; open-source circuit simulator Qucs; seamless multiphysics mixed simulation; Electrostatics; Equations; Equivalent circuits; Force; Integrated circuit modeling; Mathematical model; Solid modeling; equivalent circuit; mems; micro actuato; micro mirror;
fLanguage
English
Publisher
ieee
Conference_Titel
Computational Electronics (IWCE), 2010 14th International Workshop on
Conference_Location
Pisa
Print_ISBN
978-1-4244-9383-8
Type
conf
DOI
10.1109/IWCE.2010.5677995
Filename
5677995
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