Noise spectroscopy measurements in metallic oxide gas microsensors

Author

Contaret, T. ; Gomri, S. ; Seguin, J.-L. ; Aguir, K.

Author_Institution

Aix-Marseille Univ., Marseille

fYear

2008

fDate

26-29 Oct. 2008

Firstpage

200

Lastpage

203

Abstract

Noise spectroscopy is one of the solutions to enhance the selectivity of metal oxide sensors. This experimental technique is based on analysis of the power spectral density of noise fluctuations measured at the terminals of sensors in the presence of one or more gas. A specific noise measurement system has been developed to characterize the low frequency noise behavior of SnO₂ gas microsensors under various gases. The noise voltage spectral density can be interpreted in terms of number fluctuations of the adsorbed molecules called adsorption-desorption noise. Our experimental results confirmed that noise spectroscopy could be used as a mean of improving gas sensors selectivity.

Keywords

adsorbed layers; adsorption; desorption; fluctuations; gas sensors; noise; semiconductor materials; tin compounds; SnO₂; adsorbed molecules; adsorption-desorption noise; metallic oxide gas microsensors; noise fluctuations; noise spectroscopy; power spectral density; voltage spectral density; Density measurement; Fluctuations; Gas detectors; Gases; Low-frequency noise; Microsensors; Noise measurement; Power measurement; Sensor phenomena and characterization; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2008 IEEE

Conference_Location

Lecce

ISSN

1930-0395

Print_ISBN

978-1-4244-2580-8

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2008.4716417

Filename

4716417