A capacitive biosensor based on ultrathin Si membranes

Author

Tsouti, V. ; Goustouridis, D. ; Chatzandroulis, S. ; Normand, P. ; Andreakou, P. ; Ioannou, M. ; Kafetzopoulos, D. ; Boutopoulos, C. ; Zergioti, I. ; Tsoukalas, D. ; Hue, J. ; Rousier, R.

Author_Institution

Inst. of Microelectron., NCSR Demokritos, Athens

fYear

2008

fDate

26-29 Oct. 2008

Firstpage

223

Lastpage

226

Abstract

A biosensor which takes advantage of surface stress changes during biological interactions and is able to translate them into a capacitive signal is presented. The sensor consists of an ultrathin silicon membrane on which receptor molecules are immobilized. During biomolecular interactions, the surface stress changes and the membrane deflects resulting in a change in device capacitance. The biosensor is part of a 16 times 16 array thus allowing for the making of larger assays with the concurrent sensing of multiple biological targets. First results using the biotin-steptavidin system are presented.

Keywords

biomembranes; biosensors; capacitive sensors; silicon; Si; biomolecular interactions; biotin-steptavidin system; capacitive biosensor; surface stress change; ultrathin membranes; Biomembranes; Biosensors; Capacitive sensors; Capacitors; Electrodes; Optical noise; Sensor arrays; Sensor phenomena and characterization; Silicon; Tensile stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2008 IEEE

Conference_Location

Lecce

ISSN

1930-0395

Print_ISBN

978-1-4244-2580-8

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2008.4716421

Filename

4716421