Title :
Acoustic vs electric power response of a high-performance MEMS microspeaker
Author :
Houdouin, Alexandre ; Durand, Stephane ; Yaakoubi, Nourdin ; Sassine, Gilbert ; Shahosseini, Iman ; Martincic, Emile ; Woytasik, Marion ; Moulin, Johan ; Lefeuvre, Elie
Author_Institution :
Lab. d´Acoust., Univ. du Maine, Le Mans, France
Abstract :
This paper presents the characterization of the acoustic performance of an electrodynamic MEMS microspeaker and the influence of magnets position, which allows halving device size while intensifying the force factor. This work is based on the previously reported MEMS microspeaker dedicated to handheld electronics. A vacuum-formed seal has been designed and applied to enhance acoustic performance at low frequencies. The efficiency of the electroacoustic conversion is increased by a factor 5-10 compared to conventional microspeakers and low harmonic distortions were observed. Measurements of the acoustic power versus electrical input power were carried out in an anechoic room within the hearing range.
Keywords :
acoustoelectric devices; anechoic chambers (acoustic); electrodynamics; harmonic distortion; micromechanical devices; acoustic power response; anechoic room; electric power response; electroacoustic conversion; electrodynamic MEMS microspeaker; force factor; handheld electronics; high-performance MEMS microspeaker; low harmonic distortions; magnets position; vacuum-formed seal; Acoustics; Coils; Force; Magnetoacoustic effects; Magnetomechanical effects; Micromechanical devices; Silicon;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6984941
