The use of STADIUM statistical TCAD simulation methodology in industrial environments

Author

Sanders, Thomas J. ; Shahsavari, M. Mehdi ; Means, Dale P.

Author_Institution

Dept. of Electr. & Comput. Eng., Florida Inst. of Technol., Melbourne, FL, USA

fYear

1993

fDate

18-19 May 1993

Firstpage

46

Lastpage

50

Abstract

The software program called STADIUM has been developed by researchers at Florida Institute of Technology. The purpose of STADIUM is to facilitate the statistical design and simulation of integrated processes, devices and products. It is a software shell which uses existing simulators in a design of experiments statistical methodology, and which allows the estimation of the statistical response of the manufacturing environment. Some of the details of STADIUM are described together with activities of the Florida SEMATECH Center of Excellence to implement this software in several industrial environments

Keywords

circuit CAD; production engineering computing; semiconductor device models; semiconductor process modelling; statistical analysis; STADIUM statistical TCAD simulation methodology; design for manufacturing; design of experiments statistical methodology; device simulation; industrial environments; integrated circuit; integrated process simulation; manufacturing environment; product simulation; software program; statistical design; statistical response; Circuit simulation; Computational modeling; Computer industry; Design for manufacture; Integrated circuit yield; Manufacturing processes; Predictive models; Software tools; Statistical analysis; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 1993., Proceedings of the Tenth Biennial

Conference_Location

Research Triangle Park, NC

ISSN

0749-6877

Print_ISBN

0-7803-0990-1

Type

conf

DOI

10.1109/UGIM.1993.297039

Filename

297039