Investigation of polymer deposition techniques on a Solidly Mounted Resonator arrays for vapour sensing

In this work we fabricate and test arrays of Solidly Mounted Resonators (SMRs), which are normally used in RF filters, to make gravimetric vapour sensing system. Each of the SMRs in the array are made to be chemically sensitive using commercially available polymers deposited on the active areas of the resonators using three different deposition techniques, namely needle dispensing, spraying and inkjet printing. Of the three methods, it was found that inkjet printing is the most effective as it can be used with a wide variety of solutions deposited with a good degree of accuracy. Three solvent vapours were used to test chips with polymers deposited using the 3 techniques and the selectivity results are shared.