Micromachined mid-infrared emitter for fast transient temperature operation for optical gas sensing systems

A novel micromachined thermal emitter for fast transient temperature operation is presented. Most commercial available thermal emitters are not able to operate in a pulsed mode. The spider type hotplate concept promises an excellent mechanical stability together with high thermal decoupling. The thermal emitter is fabricated using silicon on insulator (SOI) technology and KOH-etching. The emitter is heated with a Pt-meander structure and the device is mounted in a TO-5 housing. Different suspensions structures as well as hotplate sizes were realized and mechanical and thermal characterizations were performed. Beside the possibility of pulsed operation, a high thermal emission at wavelengths >5 mum are achieved. Investigations on possible coatings for emissivity enhancement are the focus of the current work.