Title :
Investigation of higher mode excitation of resonant mass density and viscosity sensors
Author :
Heinisch, Martin ; Reichel, Erwin K. ; Jakoby, Bernhard ; Voglhuber-Brunnmaier, Thomas ; Dufour, Isabelle
Author_Institution :
Inst. f. Microelectron. & Microsensors, Johannes Kepler Univ., Linz, Austria
Abstract :
The application of resonant devices for mass density and viscosity sensing by evaluating their change of quality factor and resonance frequency upon immersion in a sample liquid was already reported in literature with increasing amount of publications in the last years. Usually, these resonant devices are operated at a single measurable and characteristic resonant mode. In this work, we investigate the operation of recently devised sensors at two measurable modes, show experimental results and discuss potential advantages of recording more than one mode in case of resonant mass density and viscosity sensors.
Keywords :
Q-factor; density measurement; flow sensors; mass measurement; resonators; viscosity measurement; higher mode excitation; measurable mode; quality factor; resonance frequency; resonant devices; resonant mass density sensor; resonant mode; viscosity sensor; Liquids; Resonant frequency; Sensitivity; Sensors; Vibrations; Viscosity; Wires;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6984980