DocumentCode
1894484
Title
Plasma standard cell for laboratory demonstrations and experiments
Author
Lane, Richard L. ; Grimsley, Thomas J.
Author_Institution
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
fYear
1993
fDate
18-19 May 1993
Firstpage
213
Lastpage
218
Abstract
The design, construction, and use of an apparatus for undergraduate laboratory experimentation and demonstration in the area of plasma technology and processes are described. Specific experiments being utilized are detailed. Plans for additional equipment features are discussed
Keywords
demonstrations; education; integrated circuit technology; laboratory apparatus and techniques; plasma applications; semiconductor technology; laboratory apparatus; laboratory demonstrations; microelectronic fabrication; plasma processes; plasma standard cell; plasma technology; undergraduate laboratory experimentation; Educational institutions; Electrodes; Fabrication; Laboratories; Microelectronics; Plasma applications; Plasma materials processing; Sputter etching; Sputtering; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1993., Proceedings of the Tenth Biennial
Conference_Location
Research Triangle Park, NC
ISSN
0749-6877
Print_ISBN
0-7803-0990-1
Type
conf
DOI
10.1109/UGIM.1993.297055
Filename
297055
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