Surface morphology, microstructure and mechanical properties of thin Ag films

Thin Ag films deposited onto SiO/sub 2//Si substrates by DC magnetron sputtering and thereafter annealed at temperatures 100-500/spl deg/C are investigated by scanning tunneling and atomic force microscopy. It is shown that the film surface topography and microstructure are considerably changed as a result of annealing. To provide a quantitative estimation of the surface topography changes of Ag films the surface fractal dimension was calculated. Elasticity and hardness of the films are studied by a nanoindentation technique. The films are found to have value of elastic modulus close to that of bulk silver while their hardness and yield stress are essentially higher.