Dynamic macromodels for sensor devices

The focus of this paper is the generation of macromodels that capture all relevant information of sensor devices. The approach starts with a finite element model, which considers electromechanical coupling and fluid-structure interaction at the continuous-field level. ANSYS/Multiphysics reduced order model (ROM) procedures are used to reduce the large amount of degrees of freedom of the device model. The procedure is based on a linear modal analysis and the representation of the state variables in terms of a small series of basis functions. The resulting device models are suitable for system simulation. The generation pass and the use of such models will be demonstrated for capacitive sensor devices. Results are compared with analytical solutions and experimental data. The presented model generation path is part of the sensor design flow. Device models are used for optimization and circuit design.