Title :
Morphological features of nanostructured silicon obtained by metal-assisted chemical etching
Author :
Pavlenko, N.N. ; Iatsunskyi, I.R. ; Smyntyna, V.A. ; Sviridova, O.V.
Author_Institution :
Odessa Nat. Univ., Odessa, Ukraine
Abstract :
The results of research of the morphological characteristics of nanostructured silicon are presented.
Keywords :
elemental semiconductors; etching; nanostructured materials; silicon; surface morphology; Si; metal-assisted chemical etching; morphological characteristics; nanostructured silicon; Chemicals; Etching; Hafnium; Oxidation; Silicon; Substrates;
Conference_Titel :
Microwave and Telecommunication Technology (CriMiCo), 2012 22nd International Crimean Conference
Conference_Location :
Sevastopol, Crimea
Print_ISBN :
978-1-4673-1199-1
