DocumentCode
1895097
Title
Morphological features of nanostructured silicon obtained by metal-assisted chemical etching
Author
Pavlenko, N.N. ; Iatsunskyi, I.R. ; Smyntyna, V.A. ; Sviridova, O.V.
Author_Institution
Odessa Nat. Univ., Odessa, Ukraine
fYear
2012
fDate
10-14 Sept. 2012
Firstpage
659
Lastpage
660
Abstract
The results of research of the morphological characteristics of nanostructured silicon are presented.
Keywords
elemental semiconductors; etching; nanostructured materials; silicon; surface morphology; Si; metal-assisted chemical etching; morphological characteristics; nanostructured silicon; Chemicals; Etching; Hafnium; Oxidation; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave and Telecommunication Technology (CriMiCo), 2012 22nd International Crimean Conference
Conference_Location
Sevastopol, Crimea
Print_ISBN
978-1-4673-1199-1
Type
conf
Filename
6336136
Link To Document