An all-metal passive threshold sensor for omni-directional vibration monitoring application

Author

Wenguo Chen ; Guifu Ding ; Yan Wang ; Hong Wang ; Xiaolin Zhao ; Chunsheng Yang ; Zhuoqing Yang

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Shanghai Jiao Tong Univ., Shanghai, China

fYear

2014

fDate

2-5 Nov. 2014

Firstpage

428

Lastpage

431

Abstract

This paper reports the design, fabrication and testing of an all-metal omni-directional passive threshold sensor for vibration monitoring. The entire structure is fabricated with nickel by low-temperature photoresist modeled electroplating technology. The fixed electrodes in horizontal and vertical direction have been designed as cantilever and multi-hole cross-beam, respectively, which can reduce the contact bouncing and damage effectively. The dynamic contact process is simulated by ANSYS software. The function of the proposed device has been demonstrated by dropping hammer system, which indicates that the threshold level in the horizontal direction is ~65g with holding time is ~40μs and 60g with holding time is ~150μs in the vertical direction.

Keywords

cantilevers; electroplating; monitoring; photoresists; sensors; vibration measurement; ANSYS software; all-metal passive threshold sensor; cantilever; contact bouncing reduction; dropping hammer system; dynamic contact process simulation; electroplating technology; fixed electrode; low-temperature photoresist model; multihole cross-beam; omnidirectional vibration monitoring application; Acceleration; Contacts; Electrodes; Fabrication; Monitoring; Springs; Switches; micro electro mechanical system; omni-directional vibration Monitoring; threshold sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2014 IEEE

Conference_Location

Valencia

Type

conf

DOI

10.1109/ICSENS.2014.6985026

Filename

6985026