MEMS artificial canal neuromast sensor arrays for underwater sensing

Author

Kottapalli, Ajay Giri Prakash ; Asadnia, Mohsen ; Jianmin Miao ; Triantafyllou, Michael S.

Author_Institution

Center for Environ. Sensing & Modeling (CENSAM), Singapore-MIT Alliance for Res. & Technol. (SMART), Singapore, Singapore

fYear

2014

fDate

2-5 Nov. 2014

Firstpage

448

Lastpage

451

Abstract

The paper reports the development of biomimetic haircell sensors inspired by the neuromast sensors present in fish. Two different types of sensors are fabricated - the superficial haircell sensors which perform flow velocity sensing and the canal encapsulated haircell sensors which perform flow acceleration sensing. Flexible arrays of polymer MEMS haircell sensors are fabricated and encapsulated in polydimethylsiloxane (PDMS) canal structures. The superficial haircell sensors are calibrated in water tunnel for flow velocity sensing and the steady-state flow filtering ability of the canal encapsulated haircell sensors is experimentally investigated.

Keywords

biomimetics; flow sensors; microsensors; polymers; MEMS artificial canal neuromast sensor arrays; PDMS canal structures; biomimetic haircell sensors; canal encapsulated haircell sensors; flexible sensor arrays; flow acceleration sensing; flow velocity sensing; neuromast sensors; polydimethylsiloxane; polymer MEMS haircell sensors; steady state flow filtering ability; superficial haircell sensors; underwater sensing; water tunnel; Irrigation; Marine animals; Micromechanical devices; Robot sensing systems; Sensor arrays; Steady-state;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2014 IEEE

Conference_Location

Valencia

Type

conf

DOI

10.1109/ICSENS.2014.6985031

Filename

6985031