Modeling of MEMS high-order mode inter-digital waveform synthesizer for Flexural Plate Array sensors

In this work, the principles of Inter-Digital Transducer design are applied to develop parallel plate transducers that actuate high-order waveforms in Flexural Plate Arrays (FPAs). While in a high-order mode, the FPA may serve as an acoustic sensor or biosensor, which displays a superior sensitivity when compared with sensors operated in the fundamental mode. The MEMS high-order programmable waveform synthesizer is realized by fabricating electrodes in an inter-digital and fully balanced differential scheme, above and below flexural plates. Applications of this technology include wideband Lamb acoustic wave sensors and actuators, as well as micro-fluidic sensors.