DocumentCode
1896136
Title
The effect of cyclic hardening in copper heat-sinks on die fracture probability
Author
Bielen, Jeroen ; Van Gils, Marcel ; Theunis, Frank
Author_Institution
IC Manuf. Operations, Philips Semicond., Nijmegen, Netherlands
fYear
2005
fDate
18-20 April 2005
Firstpage
290
Lastpage
296
Abstract
The use of pure copper heat-sinks (also termed flange) is a significant step forward to improve the thermal performance of flange mounted RF devices. One of the major risks however, is the large CTE mismatch between copper and silicon, which may result in die fracture. In order to asses the probability of die fracture during temperature cycling, a FE modeling study, combined with experiments to extract material properties, validate the models and get material strength data, has been performed and will be presented here. In order to take into account nonuniform and changing stress distributions and the probabilistic nature of surface defects that determine the die fracture strength, Weibull statistics and a surface area stress integral have been used to calculate the probability of die fracture. With incorporation of the cyclic hardening of the copper, by a combined kinematic and isotropic constitutive model, the predicted failure probability matched experimentally observed failure probabilities and provides a physical explanation for early failures.
Keywords
Weibull distribution; copper; finite element analysis; fracture toughness; hardening; heat sinks; microassembling; radiofrequency integrated circuits; CTE mismatch; Cu; FE modeling study; RF device; Si; Weibull statistics; copper heat sink; cyclic hardening effect; die fracture probability; die fracture strength; flange; kinematic isotropic constitutive model; material properties; material strength data; stress distribution; surface area stress integral; surface defect; thermal performance; Copper; Data mining; Flanges; Iron; Probability; Radio frequency; Silicon; Stress; Surface cracks; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. EuroSimE 2005. Proceedings of the 6th International Conference on
Print_ISBN
0-7803-9062-8
Type
conf
DOI
10.1109/ESIME.2005.1502816
Filename
1502816
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