Title :
Chapter 12, Multi-physics modelling and characterization
Keywords :
Aluminum; Batteries; CMOS technology; Capacitors; Copper; Electronic packaging thermal management; Fabrication; Micromechanical devices; Silicon; Testing;
Conference_Titel :
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2005. EuroSimE 2005. Proceedings of the 6th International Conference on
Print_ISBN :
0-7803-9062-8
DOI :
10.1109/ESIME.2005.1502819
