DocumentCode
189682
Title
Towards atomic force microscopy measurements using differential self-mixing interferometry
Author
Azcona, Francisco J. ; Royo, Santiago ; Jha, Ajit
Author_Institution
Centre for Sensors, Instrum. & Syst. Dev., UPC-Barcelona Tech, Terrassa, Spain
fYear
2014
fDate
2-5 Nov. 2014
Firstpage
766
Lastpage
770
Abstract
In this paper, we explore the possibility of joining two measurement techniques that share a similar time frame and that are interested in describing the properties of materials through the study of the micro and nanometric scale. Atomic force microscopy (AFM) is a well established method capable of measuring different material properties by examining the deflection of a micro-cantilever caused by the sample surface force interactions. The cantilever deflection is typically estimated using the optical lever technique which requires a careful alignment of the laser beam and the cantilever. To reduce such problem, we propose the use of differential self-mixing interferometry (DSMI). A test to prove the feasibility of applying the DSMI on an AFM cantilever will be discussed as well as the problems found during the measurement. Preliminary results show that DSMI is capable of following up cantilever sinusoidal displacements with amplitudes in the range of 200 and 100nm which can usually be found in AFM non-contact and taping modes.
Keywords
atomic force microscopy; cantilevers; laser beams; micromechanical devices; atomic force microscopy cantilever; atomic force microscopy measurements; atomic force microscopy noncontact mode; atomic force microscopy taping mode; cantilever sinusoidal displacements; differential self-mixing interferometry; laser beam; material properties; measurement techniques; microcantilever deflection; micrometric scale; nanometric scale; optical lever technique; sample surface force interactions; time frame; Displacement measurement; Measurement by laser beam; Microscopy; Optical feedback; Optical interferometry; Sensors; Time measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
SENSORS, 2014 IEEE
Conference_Location
Valencia
Type
conf
DOI
10.1109/ICSENS.2014.6985112
Filename
6985112
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