Title :
Micro preconcentrator with embedded 3D pillars for breath analysis applications
Author :
Alfeeli, Bassam ; Agah, Masoud
Author_Institution :
Dept. of Adv. Syst., VT MEMS Lab., Virginia Polytech. Inst. & State Univ., Kuwait City
Abstract :
This paper presents a high-performance microfabricated preconcentrator consisting of a micro-cavity with embedded 3D structures and on-chip thermal desorption capability. The novel crisscross pillar design with multiple inlet/outlet ports demonstrated high surface to volume ratio, higher probability of adsorption, and improved sample distribution. This device achieved a preconcentration factor of more than 10,000 making it suitable for hand-held breath analyzers to concentrate and identify trace levels of volatile organic compounds found in human breath.
Keywords :
bioMEMS; biosensors; chemical sensors; desorption; microsensors; organic compounds; crisscross pillar design; embedded 3D pillars; hand-held breath analyzer; human breath; micro preconcentrator; microcavity; on-chip thermal desorption capability; volatile organic compounds; Blood; Cancer; Cardiac disease; Fabrication; Gas detectors; Humans; Lungs; Micromechanical devices; Personal communication networks; Volatile organic compounds;
Conference_Titel :
Sensors, 2008 IEEE
Conference_Location :
Lecce
Print_ISBN :
978-1-4244-2580-8
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2008.4716547