Programmable high density CMOS microelectrode array

We have developed a programmable high density CMOS microelectrode array (ldquoMEArdquo) for in vitro monitoring of electrogenic cells. Non-volatile analog memory within each sensor may be used to calibrate the array and to program arbitrary offsets onto amplifiers integrated within each sensor. As a result, we can compensate for device mismatch, process variation and environmental inhomogeneity that can confound comparison of signals recorded from different sites on conventional MEAs. At the same time, we maintain resolution rivaling the densest integrated MEAs - in a commercial 0.5 mum CMOS process we have implemented a 128times128 array with electrodes spaced at 14 mum pitch, the same scale as biological cells.