Microplasma chamber for molecular emission spectroscopy

In this work the fabrication, functional characterisation and analytical application of a micromachined plasma reactor based on Dielectric-Barrier Discharge (DBD) is presented. The microplasma reactor was manufactured by the combination of conventional micromachining technology and microchannel structuring methods to form coplanar electrode system in compact glass reactor chamber. The functional parameters of the miniaturized DBD micro plasma generator were determined during the device was applied as atmospheric pressure gas plasma source. The molecular composition in the micro plasma chamber was monitored by optical spectrometer, and the analytical applicability of the source was demonstrated by detection molecular emission spectra of test gases and vapours. For studying feasibility in analytical applications CO₂ and organic solvent vapour were injected and the change in detected molecular emission spectra were analysed qualitatively.