Design and analysis of MEMS cantilever for pyroelectric energy conversion using COMSOL Multiphysics

Author

Kaveeshwar, Ashwini ; Swarnalatha, R. ; Prasad, D.V. ; Razak, Abdul

Author_Institution

Dept. of EEE, BITS Pilani, Dubai, United Arab Emirates

fYear

2015

fDate

5-7 March 2015

Firstpage

1

Lastpage

4

Abstract

Microelectromechanical Systems (MEMS) has found vast applications in today´s world. Many applications in the field of aerospace, biomedicine, laser scanning displays and biomedical imaging systems are realized using MEMS technology. Pyroelectric materials show temperature dependent spontaneous electrical polarization converting thermal energy to electrical energy. In this paper, a self actuating MEMS cantilever for pyroelectric energy conversion is designed using COMSOL Multiphysics software. The energy conversion mechanism and response of a MEMS cantilever with PVDF as pyroelectric material is studied. The base materials used include Silicon Dioxide, Silicon, Aluminum, Polyvinylidine Fluoride (PVDF).

Keywords

cantilevers; micromechanical devices; silicon compounds; Al; COMSOL multiphysics; MEMS cantilever; MEMS technology; Si; SiO₂; aerospace; biomedical imaging systems; biomedicine; electrical energy; laser scanning displays; microelectromechanical systems; polyvinylidine fluoride; pyroelectric energy conversion; pyroelectric materials; thermal energy; Aluminum; Chemicals; Heating; MATLAB; Micromechanical devices; Temperature dependence; Bimorph Cantilever; COMSOLMultiphysics; MATLAB; MEMS; Pyroelectric effect;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical, Computer and Communication Technologies (ICECCT), 2015 IEEE International Conference on

Conference_Location

Coimbatore

Print_ISBN

978-1-4799-6084-2

Type

conf

DOI

10.1109/ICECCT.2015.7226001

Filename

7226001