Title :
Design and analysis of MEMS cantilever for pyroelectric energy conversion using COMSOL Multiphysics
Author :
Kaveeshwar, Ashwini ; Swarnalatha, R. ; Prasad, D.V. ; Razak, Abdul
Author_Institution :
Dept. of EEE, BITS Pilani, Dubai, United Arab Emirates
Abstract :
Microelectromechanical Systems (MEMS) has found vast applications in today´s world. Many applications in the field of aerospace, biomedicine, laser scanning displays and biomedical imaging systems are realized using MEMS technology. Pyroelectric materials show temperature dependent spontaneous electrical polarization converting thermal energy to electrical energy. In this paper, a self actuating MEMS cantilever for pyroelectric energy conversion is designed using COMSOL Multiphysics software. The energy conversion mechanism and response of a MEMS cantilever with PVDF as pyroelectric material is studied. The base materials used include Silicon Dioxide, Silicon, Aluminum, Polyvinylidine Fluoride (PVDF).
Keywords :
cantilevers; micromechanical devices; silicon compounds; Al; COMSOL multiphysics; MEMS cantilever; MEMS technology; Si; SiO2; aerospace; biomedical imaging systems; biomedicine; electrical energy; laser scanning displays; microelectromechanical systems; polyvinylidine fluoride; pyroelectric energy conversion; pyroelectric materials; thermal energy; Aluminum; Chemicals; Heating; MATLAB; Micromechanical devices; Temperature dependence; Bimorph Cantilever; COMSOLMultiphysics; MATLAB; MEMS; Pyroelectric effect;
Conference_Titel :
Electrical, Computer and Communication Technologies (ICECCT), 2015 IEEE International Conference on
Conference_Location :
Coimbatore
Print_ISBN :
978-1-4799-6084-2
DOI :
10.1109/ICECCT.2015.7226001
