Title :
Screen printed flexible capacitive pressure sensor
Author :
Eshkeiti, A. ; Emamian, S. ; Avathu, Sai G. R. ; Narakathu, B.B. ; Joyce, M.J. ; Joyce, M.K. ; Bazuin, B.J. ; Atashbar, M.Z.
Author_Institution :
Dept. of Electr. & Comput. Eng., Western Michigan Univ., Kalamazoo, MI, USA
Abstract :
A novel flexible fully printed capacitive based pressure sensor was designed and fabricated using screen printing technique. Silver (Ag) ink and polydimethylsiloxane (PDMS) were printed on a flexible polyethylene terephthalate (PET) substrate as metallization and dielectric layers, respectively. The capacitive response of the sensor demonstrated a percentage change of 1 % and 3.6 % for compressive forces of 0.2 MPa and 2.4 MPa, respectively when compared to the base capacitance. The response of the pressure sensor is analyzed and presented in this paper.
Keywords :
capacitive sensors; dielectric thin films; flexible electronics; polymer films; pressure sensors; semiconductor device metallisation; silver; thick film sensors; Ag; PDMS; PET; compressive forces; dielectric layers; flexible polyethylene terephthalate; metallization; polydimethylsiloxane; pressure 0.2 MPa to 2.4 MPa; screen printed flexible capacitive pressure sensor; Capacitance; Dielectrics; Electrodes; Fabrication; Ink; Printing; Substrates;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6985222
