Title :
Accurate analog temperature control of a thin film microheater on glass substrate for lab-on-chip applications
Author :
Scorzoni, A. ; Tavernelli, M. ; Placidi, P. ; Valigi, P. ; Nascetti, A.
Author_Institution :
Dept. of Eng., Univ. of Perugia, Perugia, Italy
Abstract :
This paper presents a new methodology to accurately manage the temperature of microheaters manufactured on glass, based on an analog control circuit built around a single operational amplifier. The first step is an accurate electro-thermal characterization of the microheater, using a 4-terminal topology, in order to extract i) the microheater active area temperature as a function of both heating power and 2-wire electrical resistance and ii) the thermal resistances and capacitances of a thermal model. Then experimental measurements are shown and compared with simulations obtained using PSpice modelling.
Keywords :
analogue integrated circuits; electrical resistivity; lab-on-a-chip; micromechanical devices; operational amplifiers; temperature control; temperature sensors; thermal analysis; thermal resistance measurement; PSpice modelling; analog control circuit; analog temperature control; electrical resistance; electrothermal characterization; glass substrate; heating power; lab-on-chip applications; microheater active area temperature; operational amplifier; thermal model; thermal resistances; thin film microheater; Electrical resistance measurement; Glass; Heating; Temperature measurement; Temperature sensors; Thermal resistance; 4-wire measurement; Analog temperature control circuit; Lab-on-chip; Microheater on glass; Stability analysis of OpAmp circuit; Thin film microheater; thermal capacitance; thermal resistance; thermal time constant;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6985228
