Functionalized micromolded nanoparticles towards gas sensor arrays

Chemiresistive sensors show promise for low-cost gas monitoring applications, but their low selectivity raises concerns about false positive response. We present a patterning process with self-aligned functionalization mask for gas-sensitive nanoparticles in multiplexed arrays. The nanoparticle patterning features are laser micromachined alongside mask features in a polymer template during the same process step. Nanoparticle ink is introduced to the fabricated template, creating cohesive features without a residual layer. The template is selectively removed to create a mask to expose, passivate, or functionalize the templated nanoparticles. We fabricate an Ag-on-ZnO chemiresistor and demonstrate device response to a CO/Ar mixture gas.