DocumentCode
189963
Title
Effect of rounding on the sensitivity of optical antennas based sensors
Author
Mehta, Bhaven ; Zaghloul, Mona E.
Author_Institution
Dept. of Electr. & Comput. Eng., George Washington Univ., Washington, DC, USA
fYear
2014
fDate
2-5 Nov. 2014
Firstpage
1391
Lastpage
1394
Abstract
In this work we present the effect of rounding on the bulk sensitivity of the optical antenna. Dipole structures are simulated. Fabrication of the dipole optical antenna structures involves use of high resolution e-beam lithography (EBL), metal deposition and lift-off. It is expected that using the fabrication process, we should be able to fabricate exact dipole structures with sharp corners without using any advanced techniques like proximity corrections etc. These techniques increase the cost of the device. So, it is important to determine that whether the rounded corners improve the sensitivity for the sensors. Using Finite Difference Time Domain (FDTD) simulation techniques we found that dipole structure with rounded corners improves the sensitivity of the gas sensor.
Keywords
dipole antennas; electron beam lithography; finite difference time-domain analysis; gas sensors; optical sensors; dipole optical antenna structures; finite difference time domain simulation; gas sensor sensitivity; high resolution e-beam lithography; lift-off; metal deposition; optical antennas based sensors; rounding effect; Dipole antennas; Optical device fabrication; Optical refraction; Optical sensors; Optical variables control; Sensitivity;
fLanguage
English
Publisher
ieee
Conference_Titel
SENSORS, 2014 IEEE
Conference_Location
Valencia
Type
conf
DOI
10.1109/ICSENS.2014.6985272
Filename
6985272
Link To Document