• DocumentCode
    1900388
  • Title

    Detecting non-hydrogen containing species with field effect devices

  • Author

    Andersson, Mike ; Spetz, Anita Lloyd

  • Author_Institution
    Dept. of Phys., Chem., & Biol., Linkoping Univ., Linkoping
  • fYear
    2008
  • fDate
    26-29 Oct. 2008
  • Firstpage
    1320
  • Lastpage
    1323
  • Abstract
    An investigation of the influence and role of oxygen in the detection of non-hydrogen containing substances with Pt/SiO2/SiC based MOS field effect sensors, employing new model systems, has been carried out. With the use of a novel intermediate layer, by which the direct influence of hydrogen on the sensor response can be markedly reduced, the part of the sensor response which is not directly related to hydrogen (which to a small extent is always present in any gas mixture) could be resolved. The Pt/SiO2 NO reduction/oxidation model system has also been studied from a sensor perspective and the results compared to spectroscopic and mass spectrometry studies of the surface reactions from the field of catalysis. The results support the hypothesis from earlier work that the removal of oxygen from the sensor surface (e.g. by oxidation reactions with CO or NO) to a certain extent directly is involved in the detection of non-hydrogen containing species.
  • Keywords
    MIS devices; catalysis; chemical sensors; mass spectra; oxidation; reduction (chemical); surface chemistry; MOS field effect sensors; Pt-SiO2-SiC; catalysis; mass spectrometry; nonhydrogen containing substances detection; reduction-oxidation model system; spectroscopy; surface reactions; Automotive materials; Biosensors; Gas detectors; Hydrogen; Metal-insulator structures; Oxidation; Semiconductor materials; Sensor systems; Silicon carbide; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2008 IEEE
  • Conference_Location
    Lecce
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-2580-8
  • Electronic_ISBN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2008.4716688
  • Filename
    4716688