Title :
Design, fabrication and characterization of a micro-machined gravity gradiometer suspension
Author :
Huafeng Liu ; Pike, W.T. ; Guangbin Dou
Author_Institution :
Opt. & Semicond. Devices Group, Imperial Coll. London, London, UK
Abstract :
This paper presents the design, fabrication and characterization of a suspension for rotational micromachined sensors with an ultra-low rotational spring stiffness but very high spurious-modes rejection ratios. This suspension is applied to a micro-machined gravity gradiometer for satellite gravity surveys, achieving a 3.38 Hz resonant frequency with the first spurious rejection ratio of 23.
Keywords :
gravimeters; micromachining; microsensors; frequency 3.38 Hz; micromachined gravity gradiometer suspension; resonant frequency; rotational micromachined sensors; satellite gravity surveys; spurious mode rejection ratio; ultra low rotational spring stiffness; Frequency measurement; Gravity; Oscillators; Sensors; Suspensions; Transducers; Vibrations; Gravity Gradiometer; MEMS; Rotary Suspension;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6985327
