Title :
Interlacing method for micro-patterning silver via inkjet printing
Author :
Guijun Li ; Roberts, Robert C. ; Tien, Norman C.
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. of Hong Kong, Hong Kong, China
Abstract :
Inkjet-printed metal nanoparticles have been intensively studied for microelectronic applications including both physical and chemical sensors, and micro-electro-mechanical systems (MEMS). However, printed feature broadening is frequently observed due to the coalescence of un-dried ink, reducing achievable resolution. Increasing substrate temperature and reducing print rates are two common mitigation techniques, each with drawbacks. Here a novel interlacing method is introduced as an alternative strategy to manage droplet coalescence. The desired geometry is sampled into multiple sub-patterns and then printed sequentially, to yield the complete pattern. The interlacing sub-sampling matrix is selected according to the desired resolution and printing parameters to isolate each un-dried ink droplet during deposition. Printed geometries are found to retain single droplet resolution using this method. A comparison is made between samples with direct (single-pass) printing and interlaced printing. High-resolution silver planar resistors are constructed and characterized for their application as printed temperature sensors.
Keywords :
chemical sensors; drops; ink jet printing; microfabrication; microsensors; nanofabrication; nanoparticles; nanosensors; resistors; silver; Ag; MEMS; chemical sensors; direct printing; droplet resolution; high resolution silver planar resistor; inkjet printed metal nanoparticles; interlaced printing method; interlacing subsampling matrix; microelectromechanical system; microelectronic applications; micropatterning silver; physical sensors; printed feature broadening; printed geometry; printed temperature sensor; undried ink droplet coalescence; Geometry; Ink; Nanoparticles; Printing; Silver; Substrates; Temperature sensors; Additive Microfabrication; Inkjet Printing; Interlacing; Silver Nanoparticle Ink;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6985346