Title :
Multimodal measurement of proximity and touch force by light- and strain-sensitive multifunctional MEMS sensor
Author :
Sohgawa, Masayuki ; Nozawa, Akito ; Yokoyama, Hokuto ; Kanashima, Takeshi ; Okuyama, Masanori ; Abe, Takashi ; Noma, Haruo ; Azuma, Teruaki
Author_Institution :
Grad. Sch. of Sci. & Technol., Niigata Univ., Niigata, Japan
Abstract :
A multimodal sensor with Si micro-cantilever embedded in PDMS elastomer for measurement of proximity and touch forces has been fabricated and characterized. DC resistance of the strain gauge on the cantilever changes in proportion to the indentation depth of the object. On the other hand, the AC (> 0.5 MHz) impedance including photo-sensitive component of Si increases with increase of distance between the sensor surface and the object because of decrease of light intensity reflected on the object surface. Moreover, the AC impedance is different between grounding and floating of the proximate object because of difference of distribution of electrostatic field between electrodes, so that it is suggested that proximity can be detected as the impedance change by light as well as the electric field.
Keywords :
cantilevers; elastomers; electric fields; force measurement; microfabrication; microsensors; proximity effect (lithography); silicon; strain gauges; strain sensors; AC impedance; DC resistance; PDMS elastomer; Si; electrodes; electrostatic field distribution; light intensity reflection; microcantilever; multimodal proximity measurement; multimodal sensor; photosensitive component; strain gauge; strain sensitive multifunctional MEMS sensor fabrication; touch force measurement; Electrical resistance measurement; Force; Impedance; Robot sensing systems; Silicon; Surface impedance; Temperature measurement;
Conference_Titel :
SENSORS, 2014 IEEE
Conference_Location :
Valencia
DOI :
10.1109/ICSENS.2014.6985362