DocumentCode
1901732
Title
Strain gauge factor and TCR of sputter deposited Pt thin films up to 850°C
Author
Fricke, Soeren ; Friedberger, Alois ; Mueller, Gerhard ; Seidel, Helmut ; Schmid, Ulrich
Author_Institution
Dept. of Sensors, Electron. & Syst. Integration, EADS Deutschland GmbH, Munich
fYear
2008
fDate
26-29 Oct. 2008
Firstpage
1532
Lastpage
1535
Abstract
A novel, custom built measurement setup for the temperature dependent characterization of thin films under ambient and controlled gas atmosphere in respect to their electro-mechanical performance is presented. The strain gauge factor of platinum thin films (thickness: 1 mum) is determined at temperatures ranging from room temperature up to 850degC on aluminum oxide samples designed to provide a constant strain value along their axis.
Keywords
platinum; sputter deposition; strain gauges; thin films; TCR; electromechanical performance; gas atmosphere; platinum thin films; sputter deposition; strain gauge factor; Capacitive sensors; Ceramics; Contacts; Laser beams; Sputtering; Strain measurement; Temperature control; Temperature dependence; Temperature distribution; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2008 IEEE
Conference_Location
Lecce
ISSN
1930-0395
Print_ISBN
978-1-4244-2580-8
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2008.4716739
Filename
4716739
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