Novel high resolution MOEMS inclination sensor

Author

Hortschitz, Wilfried ; Steiner, Harald ; Stifter, Michael ; Kohl, Franz ; Kahr, Matthias ; Kainz, Andreas ; Raffelsberger, Tobias ; Keplinger, Franz

Author_Institution

Inst. for Integrated Sensor Syst., Danube Univ. Krems, Wiener Neustadt, Austria

fYear

2014

fDate

2-5 Nov. 2014

Firstpage

1893

Lastpage

1896

Abstract

Inclination sensors are essential elements in many different fields of application such as navigation, metrology, geodetics, geoscience, as well as in the consumer market. In general, for high precision navigation. The sensor´s resolution is one of the key parameters to improve the performance and to open up new areas of applications. The implementation of a miniaturized optical readout is one of the most promising ways to accomplish this goal. This paper discusses the principle of a novel inclination sensor along with obtained measurements of two prototypes with different mechanical parameters. The achieved sensitivity is 0.044 V/° resulting in an angular resolution of 0.0051°.

Keywords

micro-optomechanical devices; microfabrication; microsensors; optical fabrication; optical sensors; consumer market; geodetics application; geoscience application; high precision navigation application; high resolution MOEMS inclination sensor; mechanical parameter; metrology application; miniaturized optical readout; Europe; Light emitting diodes; Micromechanical devices; Photonics; Rotation measurement; Temperature measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2014 IEEE

Conference_Location

Valencia

Type

conf

DOI

10.1109/ICSENS.2014.6985399

Filename

6985399