DocumentCode
1902078
Title
A 64-kbit Dynamic MOS RAM
Author
Arai, Eiji ; Ieda, N.
Author_Institution
Musashino Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation, Musashino-shi, Tokyo, 180, Japan.
fYear
1977
fDate
20-22 Sept. 1977
Firstpage
74
Lastpage
75
Abstract
A 64-kbit, low power MOS RAM with single-poly cell has been developed by refined photolithographic technology, where minimum pattern dimension is 2 ¿m. The small cell area, 210 ¿m2, is realized by a novel sense circuit.
Keywords
Conductivity; Driver circuits; Heat treatment; Laboratories; MOSFETs; Oxidation; Read-write memory; Resists; Telegraphy; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Circuits Conference, 1977. ESSCIRC '77. 3rd European
Conference_Location
Ulm, F.R. Germany
Print_ISBN
380071132X
Type
conf
Filename
5435058
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