Influence of metal gate materials and processing on planar CMOS device characteristics with high-k gate dielectrics

Author

Majhi, P. ; Young, C. ; Bersuker, G. ; Wen, H.-C. ; Brown, G.A. ; Foran, B. ; Choi, R. ; Zeitzoff, P.M. ; Huff, H.R.

Author_Institution

Int. Sematech, Austin, TX, USA

fYear

2004

fDate

21-23 Sept. 2004

Firstpage

185

Lastpage

188

Abstract

Scaled CMOS transistors with several types of metal gates on hafnium based high-k dielectrics were processed and studied to understand the influence of metal gates on device characteristics. The different metal gates that were comparatively studied include (a) TiN processed by ALD and PVD, and (b) PVD processed TaSiN and a multilayer HfN/Ta/TiN stack. From comprehensive electrical and nanostructural characterization, it was concluded that the differences in the properties of the devices, with ALD TiN gate electrodes compared to PVD TiN were due to the presence of the additional process grown interfacial oxide layer in the former samples. When comparing the TaSiN and multilayer HfN/Ta/TiN stacks, it was noted that the variation in device characteristics could be explained by the higher amount of nitrogen pile up at the high-k-Si interface for the multilayer metal stack. In all cases, the influence of processing on the nanostructure was addressed and a preliminary understanding of the processing-structure-property interrelationship is presented.

Keywords

MOSFET; atomic layer deposition; dielectric thin films; hafnium compounds; tantalum; tantalum compounds; titanium compounds; ALD; HfN-Ta-TiN; PVD; TaSiN; high-k gate dielectrics; high-k-Si interface nitrogen pile up; metal gate electrodes; metal gate materials; metal gate processing; multilayer metal stack; nanostructure processing influence; planar CMOS devices; process grown interfacial oxide layer; Atherosclerosis; CMOS process; Electrodes; Hafnium; High K dielectric materials; High-K gate dielectrics; Inorganic materials; Nanoscale devices; Nonhomogeneous media; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research conference, 2004. ESSDERC 2004. Proceeding of the 34th European

Print_ISBN

0-7803-8478-4

Type

conf

DOI

10.1109/ESSDER.2004.1356520

Filename

1356520